11/20/2011	12:13:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2011	12:13:57 PM	Recipe started at 12:13 PM
11/20/2011	12:13:57 PM	Helium valve closed
11/20/2011	12:13:57 PM	H2 valve closed
11/20/2011	12:13:57 PM	BCl3 valve closed
11/20/2011	12:13:57 PM	PH3 valve closed
11/20/2011	12:13:57 PM	SiCl4 pre valve closed
11/20/2011	12:13:57 PM	SiCl4 post valve closed
11/20/2011	12:13:57 PM	Main Vac valve closed
11/20/2011	12:13:57 PM	Bypass valve closed
11/20/2011	12:13:57 PM	Bubbler valve closed
11/20/2011	12:13:57 PM	Helium MFC set to  0.000000
11/20/2011	12:13:57 PM	H2 MFC set to  0.000000
11/20/2011	12:13:57 PM	BCl3 MFC set to  0.000000
11/20/2011	12:13:57 PM	PHl3 MFC set to  0.000000
11/20/2011	12:13:57 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:13:57 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:13:57 PM	Tube furnace set to 0
11/20/2011	12:14:00 PM	H2 valve closed
11/20/2011	12:14:00 PM	BCl3 valve closed
11/20/2011	12:14:00 PM	PH3 valve closed
11/20/2011	12:14:00 PM	SiCl4 pre valve closed
11/20/2011	12:14:00 PM	SiCl4 post valve closed
11/20/2011	12:14:00 PM	Main Vac valve closed
11/20/2011	12:14:00 PM	Bypass valve closed
11/20/2011	12:14:00 PM	Bubbler valve closed
11/20/2011	12:14:00 PM	Helium valve opened
11/20/2011	12:14:00 PM	Helium MFC set to  500.000000
11/20/2011	12:14:00 PM	H2 MFC set to  0.000000
11/20/2011	12:14:00 PM	BCl3 MFC set to  0.000000
11/20/2011	12:14:00 PM	PHl3 MFC set to  0.000000
11/20/2011	12:14:00 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:14:00 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:14:00 PM	Tube furnace set to 0
11/20/2011	12:15:05 PM	Helium valve closed
11/20/2011	12:15:05 PM	H2 valve closed
11/20/2011	12:15:05 PM	BCl3 valve closed
11/20/2011	12:15:05 PM	PH3 valve closed
11/20/2011	12:15:05 PM	SiCl4 pre valve closed
11/20/2011	12:15:05 PM	SiCl4 post valve closed
11/20/2011	12:15:05 PM	Main Vac valve closed
11/20/2011	12:15:05 PM	Bypass valve closed
11/20/2011	12:15:05 PM	Bubbler valve closed
11/20/2011	12:15:05 PM	Helium MFC set to  0.000000
11/20/2011	12:15:05 PM	H2 MFC set to  0.000000
11/20/2011	12:15:05 PM	BCl3 MFC set to  0.000000
11/20/2011	12:15:05 PM	PHl3 MFC set to  0.000000
11/20/2011	12:15:05 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:15:05 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:15:05 PM	Tube furnace set to 0
11/20/2011	12:15:06 PM	Run finished at 12:15 PM
11/20/2011	12:15:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2011	12:22:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2011	12:22:21 PM	Recipe started at 12:22 PM
11/20/2011	12:22:21 PM	Helium valve closed
11/20/2011	12:22:21 PM	H2 valve closed
11/20/2011	12:22:21 PM	BCl3 valve closed
11/20/2011	12:22:21 PM	PH3 valve closed
11/20/2011	12:22:21 PM	SiCl4 pre valve closed
11/20/2011	12:22:21 PM	SiCl4 post valve closed
11/20/2011	12:22:21 PM	Main Vac valve closed
11/20/2011	12:22:21 PM	Bubbler valve closed
11/20/2011	12:22:21 PM	Bypass valve opened
11/20/2011	12:22:21 PM	Helium MFC set to  0.000000
11/20/2011	12:22:21 PM	H2 MFC set to  0.000000
11/20/2011	12:22:21 PM	BCl3 MFC set to  0.000000
11/20/2011	12:22:21 PM	PHl3 MFC set to  0.000000
11/20/2011	12:22:21 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:22:21 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:22:21 PM	Tube furnace set to 0
11/20/2011	12:24:21 PM	Helium valve closed
11/20/2011	12:24:21 PM	H2 valve closed
11/20/2011	12:24:21 PM	BCl3 valve closed
11/20/2011	12:24:21 PM	PH3 valve closed
11/20/2011	12:24:21 PM	SiCl4 pre valve closed
11/20/2011	12:24:21 PM	SiCl4 post valve closed
11/20/2011	12:24:21 PM	Main Vac valve closed
11/20/2011	12:24:21 PM	Bubbler valve closed
11/20/2011	12:24:21 PM	Bypass valve opened
11/20/2011	12:24:21 PM	Helium MFC set to  0.000000
11/20/2011	12:24:21 PM	H2 MFC set to  0.000000
11/20/2011	12:24:21 PM	BCl3 MFC set to  0.000000
11/20/2011	12:24:21 PM	PHl3 MFC set to  0.000000
11/20/2011	12:24:21 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:24:21 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:24:21 PM	Tube furnace set to 0
11/20/2011	12:25:21 PM	Helium valve closed
11/20/2011	12:25:21 PM	H2 valve closed
11/20/2011	12:25:21 PM	BCl3 valve closed
11/20/2011	12:25:21 PM	PH3 valve closed
11/20/2011	12:25:21 PM	SiCl4 pre valve closed
11/20/2011	12:25:21 PM	SiCl4 post valve closed
11/20/2011	12:25:21 PM	Bypass valve closed
11/20/2011	12:25:21 PM	Bubbler valve closed
11/20/2011	12:25:21 PM	Main Vac valve opened
11/20/2011	12:25:21 PM	Helium MFC set to  0.000000
11/20/2011	12:25:21 PM	H2 MFC set to  0.000000
11/20/2011	12:25:21 PM	BCl3 MFC set to  0.000000
11/20/2011	12:25:21 PM	PHl3 MFC set to  0.000000
11/20/2011	12:25:21 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:25:21 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:25:21 PM	Tube furnace set to 0
11/20/2011	12:25:22 PM	Run finished at 12:25 PM
11/20/2011	12:25:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2011	12:34:10 PM	Recipe started at 12:34 PM
11/20/2011	12:34:10 PM	Helium valve closed
11/20/2011	12:34:10 PM	H2 valve closed
11/20/2011	12:34:10 PM	BCl3 valve closed
11/20/2011	12:34:10 PM	PH3 valve closed
11/20/2011	12:34:10 PM	SiCl4 pre valve closed
11/20/2011	12:34:10 PM	SiCl4 post valve closed
11/20/2011	12:34:10 PM	Bypass valve closed
11/20/2011	12:34:10 PM	Bubbler valve closed
11/20/2011	12:34:10 PM	Main Vac valve opened
11/20/2011	12:34:10 PM	Helium MFC set to  0.000000
11/20/2011	12:34:10 PM	H2 MFC set to  0.000000
11/20/2011	12:34:10 PM	BCl3 MFC set to  0.000000
11/20/2011	12:34:10 PM	PHl3 MFC set to  0.000000
11/20/2011	12:34:10 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:34:10 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:34:10 PM	Tube furnace set to 0
11/20/2011	12:49:10 PM	H2 valve closed
11/20/2011	12:49:10 PM	BCl3 valve closed
11/20/2011	12:49:10 PM	PH3 valve closed
11/20/2011	12:49:10 PM	SiCl4 pre valve closed
11/20/2011	12:49:10 PM	SiCl4 post valve closed
11/20/2011	12:49:10 PM	Bypass valve closed
11/20/2011	12:49:10 PM	Bubbler valve closed
11/20/2011	12:49:10 PM	Helium valve opened
11/20/2011	12:49:10 PM	Main Vac valve opened
11/20/2011	12:49:10 PM	Helium MFC set to  20.000000
11/20/2011	12:49:10 PM	H2 MFC set to  0.000000
11/20/2011	12:49:10 PM	BCl3 MFC set to  0.000000
11/20/2011	12:49:10 PM	PHl3 MFC set to  0.000000
11/20/2011	12:49:10 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:49:10 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:49:10 PM	Tube furnace set to 0
11/20/2011	12:49:30 PM	Helium valve closed
11/20/2011	12:49:30 PM	H2 valve closed
11/20/2011	12:49:30 PM	BCl3 valve closed
11/20/2011	12:49:30 PM	PH3 valve closed
11/20/2011	12:49:30 PM	SiCl4 pre valve closed
11/20/2011	12:49:30 PM	SiCl4 post valve closed
11/20/2011	12:49:30 PM	Bypass valve closed
11/20/2011	12:49:30 PM	Bubbler valve closed
11/20/2011	12:49:30 PM	Main Vac valve opened
11/20/2011	12:49:30 PM	Helium MFC set to  0.000000
11/20/2011	12:49:30 PM	H2 MFC set to  0.000000
11/20/2011	12:49:30 PM	BCl3 MFC set to  0.000000
11/20/2011	12:49:30 PM	PHl3 MFC set to  0.000000
11/20/2011	12:49:30 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:49:30 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:49:30 PM	Tube furnace set to 0
11/20/2011	12:51:30 PM	H2 valve closed
11/20/2011	12:51:30 PM	BCl3 valve closed
11/20/2011	12:51:30 PM	PH3 valve closed
11/20/2011	12:51:30 PM	SiCl4 pre valve closed
11/20/2011	12:51:30 PM	SiCl4 post valve closed
11/20/2011	12:51:30 PM	Bypass valve closed
11/20/2011	12:51:30 PM	Bubbler valve closed
11/20/2011	12:51:30 PM	Helium valve opened
11/20/2011	12:51:30 PM	Main Vac valve opened
11/20/2011	12:51:30 PM	Helium MFC set to  20.000000
11/20/2011	12:51:30 PM	H2 MFC set to  0.000000
11/20/2011	12:51:30 PM	BCl3 MFC set to  0.000000
11/20/2011	12:51:30 PM	PHl3 MFC set to  0.000000
11/20/2011	12:51:30 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:51:30 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:51:30 PM	Tube furnace set to 0
11/20/2011	12:51:50 PM	Helium valve closed
11/20/2011	12:51:50 PM	H2 valve closed
11/20/2011	12:51:50 PM	BCl3 valve closed
11/20/2011	12:51:50 PM	PH3 valve closed
11/20/2011	12:51:50 PM	SiCl4 pre valve closed
11/20/2011	12:51:50 PM	SiCl4 post valve closed
11/20/2011	12:51:50 PM	Bypass valve closed
11/20/2011	12:51:50 PM	Bubbler valve closed
11/20/2011	12:51:50 PM	Main Vac valve opened
11/20/2011	12:51:50 PM	Helium MFC set to  0.000000
11/20/2011	12:51:50 PM	H2 MFC set to  0.000000
11/20/2011	12:51:50 PM	BCl3 MFC set to  0.000000
11/20/2011	12:51:50 PM	PHl3 MFC set to  0.000000
11/20/2011	12:51:50 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:51:50 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:51:51 PM	Tube furnace set to 50
11/20/2011	12:53:51 PM	H2 valve closed
11/20/2011	12:53:51 PM	BCl3 valve closed
11/20/2011	12:53:51 PM	PH3 valve closed
11/20/2011	12:53:51 PM	SiCl4 pre valve closed
11/20/2011	12:53:51 PM	SiCl4 post valve closed
11/20/2011	12:53:51 PM	Bypass valve closed
11/20/2011	12:53:51 PM	Bubbler valve closed
11/20/2011	12:53:51 PM	Helium valve opened
11/20/2011	12:53:51 PM	Main Vac valve opened
11/20/2011	12:53:51 PM	Helium MFC set to  20.000000
11/20/2011	12:53:51 PM	H2 MFC set to  0.000000
11/20/2011	12:53:51 PM	BCl3 MFC set to  0.000000
11/20/2011	12:53:51 PM	PHl3 MFC set to  0.000000
11/20/2011	12:53:51 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:53:51 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:53:51 PM	Tube furnace set to 50
11/20/2011	12:54:11 PM	Helium valve closed
11/20/2011	12:54:11 PM	H2 valve closed
11/20/2011	12:54:11 PM	BCl3 valve closed
11/20/2011	12:54:11 PM	PH3 valve closed
11/20/2011	12:54:11 PM	SiCl4 pre valve closed
11/20/2011	12:54:11 PM	SiCl4 post valve closed
11/20/2011	12:54:11 PM	Bypass valve closed
11/20/2011	12:54:11 PM	Bubbler valve closed
11/20/2011	12:54:11 PM	Main Vac valve opened
11/20/2011	12:54:11 PM	Helium MFC set to  0.000000
11/20/2011	12:54:11 PM	H2 MFC set to  0.000000
11/20/2011	12:54:11 PM	BCl3 MFC set to  0.000000
11/20/2011	12:54:11 PM	PHl3 MFC set to  0.000000
11/20/2011	12:54:11 PM	SiCl4 MFC set to  0.000000
11/20/2011	12:54:11 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	12:54:11 PM	Tube furnace set to 50
11/20/2011	12:56:11 PM	Run finished at 12:56 PM
11/20/2011	1:56:53 PM	Main Vac valve closed
11/20/2011	1:57:16 PM	Main Vac valve opened
11/20/2011	1:57:19 PM	Helium MFC set to  20.000000
11/20/2011	1:57:20 PM	Helium valve opened
11/20/2011	2:03:52 PM	Helium valve closed
11/20/2011	2:03:54 PM	Helium MFC set to  0.000000
11/20/2011	2:03:56 PM	Helium valve opened
11/20/2011	2:03:56 PM	Helium valve closed
11/20/2011	2:04:00 PM	Helium valve opened
11/20/2011	2:04:02 PM	Helium valve closed
11/20/2011	2:08:50 PM	Main Vac valve closed
11/20/2011	2:09:35 PM	Main Vac valve opened
11/20/2011	2:09:56 PM	Helium MFC set to  10.000000
11/20/2011	2:09:57 PM	Helium valve opened
11/20/2011	2:11:06 PM	Helium valve closed
11/20/2011	2:11:08 PM	Helium MFC set to  90.000000
11/20/2011	2:11:11 PM	Helium MFC set to  0.000000
11/20/2011	2:11:12 PM	Helium valve opened
11/20/2011	2:11:12 PM	Helium valve closed
11/20/2011	2:13:12 PM	Recipe started at 2:13 PM
11/20/2011	2:13:12 PM	Helium valve closed
11/20/2011	2:13:12 PM	H2 valve closed
11/20/2011	2:13:12 PM	BCl3 valve closed
11/20/2011	2:13:12 PM	PH3 valve closed
11/20/2011	2:13:12 PM	SiCl4 pre valve closed
11/20/2011	2:13:12 PM	SiCl4 post valve closed
11/20/2011	2:13:12 PM	Main Vac valve closed
11/20/2011	2:13:12 PM	Bypass valve closed
11/20/2011	2:13:12 PM	Bubbler valve closed
11/20/2011	2:13:12 PM	Helium MFC set to  0.000000
11/20/2011	2:13:12 PM	H2 MFC set to  0.000000
11/20/2011	2:13:12 PM	BCl3 MFC set to  0.000000
11/20/2011	2:13:12 PM	PHl3 MFC set to  0.000000
11/20/2011	2:13:12 PM	SiCl4 MFC set to  0.000000
11/20/2011	2:13:12 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	2:13:12 PM	Tube furnace set to 0
11/20/2011	2:13:15 PM	Helium valve closed
11/20/2011	2:13:15 PM	BCl3 valve closed
11/20/2011	2:13:15 PM	PH3 valve closed
11/20/2011	2:13:15 PM	SiCl4 pre valve closed
11/20/2011	2:13:15 PM	SiCl4 post valve closed
11/20/2011	2:13:15 PM	Main Vac valve closed
11/20/2011	2:13:15 PM	Bypass valve closed
11/20/2011	2:13:15 PM	Bubbler valve closed
11/20/2011	2:13:15 PM	H2 valve opened
11/20/2011	2:13:15 PM	Helium MFC set to  0.000000
11/20/2011	2:13:15 PM	H2 MFC set to  500.000000
11/20/2011	2:13:15 PM	BCl3 MFC set to  0.000000
11/20/2011	2:13:15 PM	PHl3 MFC set to  0.000000
11/20/2011	2:13:15 PM	SiCl4 MFC set to  0.000000
11/20/2011	2:13:15 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	2:13:15 PM	Tube furnace set to 50
11/20/2011	2:14:21 PM	Helium valve closed
11/20/2011	2:14:21 PM	BCl3 valve closed
11/20/2011	2:14:21 PM	PH3 valve closed
11/20/2011	2:14:21 PM	SiCl4 pre valve closed
11/20/2011	2:14:21 PM	SiCl4 post valve closed
11/20/2011	2:14:21 PM	Main Vac valve closed
11/20/2011	2:14:21 PM	Bypass valve closed
11/20/2011	2:14:22 PM	H2 valve opened
11/20/2011	2:14:22 PM	Bubbler valve opened
11/20/2011	2:14:22 PM	Helium MFC set to  0.000000
11/20/2011	2:14:22 PM	H2 MFC set to  500.000000
11/20/2011	2:14:22 PM	BCl3 MFC set to  0.000000
11/20/2011	2:14:22 PM	PHl3 MFC set to  0.000000
11/20/2011	2:14:22 PM	SiCl4 MFC set to  0.000000
11/20/2011	2:14:22 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	2:14:22 PM	Tube furnace set to 50
11/20/2011	2:14:23 PM	Helium valve closed
11/20/2011	2:14:23 PM	BCl3 valve closed
11/20/2011	2:14:23 PM	PH3 valve closed
11/20/2011	2:14:23 PM	SiCl4 pre valve closed
11/20/2011	2:14:23 PM	SiCl4 post valve closed
11/20/2011	2:14:23 PM	Main Vac valve closed
11/20/2011	2:14:23 PM	Bypass valve closed
11/20/2011	2:14:23 PM	H2 valve opened
11/20/2011	2:14:23 PM	Bubbler valve opened
11/20/2011	2:14:23 PM	Helium MFC set to  0.000000
11/20/2011	2:14:23 PM	H2 MFC set to  450.000000
11/20/2011	2:14:23 PM	BCl3 MFC set to  0.000000
11/20/2011	2:14:23 PM	PHl3 MFC set to  0.000000
11/20/2011	2:14:23 PM	SiCl4 MFC set to  0.000000
11/20/2011	2:14:23 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	2:14:23 PM	Tube furnace set to 1000
11/20/2011	2:37:23 PM	Helium valve closed
11/20/2011	2:37:23 PM	PH3 valve closed
11/20/2011	2:37:23 PM	Main Vac valve closed
11/20/2011	2:37:23 PM	Bypass valve closed
11/20/2011	2:37:23 PM	H2 valve opened
11/20/2011	2:37:23 PM	BCl3 valve opened
11/20/2011	2:37:23 PM	SiCl4 pre valve opened
11/20/2011	2:37:23 PM	SiCl4 post valve opened
11/20/2011	2:37:23 PM	Bubbler valve opened
11/20/2011	2:37:23 PM	Helium MFC set to  0.000000
11/20/2011	2:37:23 PM	H2 MFC set to  495.000000
11/20/2011	2:37:23 PM	BCl3 MFC set to  1.000000
11/20/2011	2:37:23 PM	PHl3 MFC set to  0.000000
11/20/2011	2:37:23 PM	SiCl4 MFC set to  25.000000
11/20/2011	2:37:23 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	2:37:23 PM	Tube furnace set to 1000
11/20/2011	2:59:23 PM	Helium valve closed
11/20/2011	2:59:23 PM	BCl3 valve closed
11/20/2011	2:59:23 PM	PH3 valve closed
11/20/2011	2:59:23 PM	SiCl4 pre valve closed
11/20/2011	2:59:23 PM	SiCl4 post valve closed
11/20/2011	2:59:23 PM	Main Vac valve closed
11/20/2011	2:59:23 PM	Bypass valve closed
11/20/2011	2:59:23 PM	H2 valve opened
11/20/2011	2:59:23 PM	Bubbler valve opened
11/20/2011	2:59:23 PM	Helium MFC set to  0.000000
11/20/2011	2:59:23 PM	H2 MFC set to  500.000000
11/20/2011	2:59:23 PM	BCl3 MFC set to  0.000000
11/20/2011	2:59:23 PM	PHl3 MFC set to  0.000000
11/20/2011	2:59:23 PM	SiCl4 MFC set to  0.000000
11/20/2011	2:59:23 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	2:59:23 PM	Tube furnace set to 750
11/20/2011	3:09:23 PM	H2 valve closed
11/20/2011	3:09:23 PM	BCl3 valve closed
11/20/2011	3:09:23 PM	PH3 valve closed
11/20/2011	3:09:23 PM	SiCl4 pre valve closed
11/20/2011	3:09:23 PM	SiCl4 post valve closed
11/20/2011	3:09:23 PM	Main Vac valve closed
11/20/2011	3:09:23 PM	Bypass valve closed
11/20/2011	3:09:23 PM	Helium valve opened
11/20/2011	3:09:23 PM	Bubbler valve opened
11/20/2011	3:09:23 PM	Helium MFC set to  400.000000
11/20/2011	3:09:23 PM	H2 MFC set to  0.000000
11/20/2011	3:09:23 PM	BCl3 MFC set to  0.000000
11/20/2011	3:09:23 PM	PHl3 MFC set to  0.000000
11/20/2011	3:09:23 PM	SiCl4 MFC set to  0.000000
11/20/2011	3:09:23 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	3:09:23 PM	Tube furnace set to 0
11/20/2011	3:34:23 PM	Helium valve closed
11/20/2011	3:34:23 PM	H2 valve closed
11/20/2011	3:34:23 PM	BCl3 valve closed
11/20/2011	3:34:23 PM	PH3 valve closed
11/20/2011	3:34:23 PM	SiCl4 pre valve closed
11/20/2011	3:34:23 PM	SiCl4 post valve closed
11/20/2011	3:34:23 PM	Main Vac valve closed
11/20/2011	3:34:23 PM	Bypass valve closed
11/20/2011	3:34:23 PM	Bubbler valve closed
11/20/2011	3:34:23 PM	Helium MFC set to  0.000000
11/20/2011	3:34:23 PM	H2 MFC set to  0.000000
11/20/2011	3:34:23 PM	BCl3 MFC set to  0.000000
11/20/2011	3:34:23 PM	PHl3 MFC set to  0.000000
11/20/2011	3:34:23 PM	SiCl4 MFC set to  0.000000
11/20/2011	3:34:23 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	3:34:23 PM	Tube furnace set to 50
11/20/2011	3:39:24 PM	Helium valve closed
11/20/2011	3:39:24 PM	H2 valve closed
11/20/2011	3:39:24 PM	BCl3 valve closed
11/20/2011	3:39:24 PM	PH3 valve closed
11/20/2011	3:39:24 PM	SiCl4 pre valve closed
11/20/2011	3:39:24 PM	SiCl4 post valve closed
11/20/2011	3:39:24 PM	Main Vac valve closed
11/20/2011	3:39:24 PM	Bubbler valve closed
11/20/2011	3:39:24 PM	Bypass valve opened
11/20/2011	3:39:24 PM	Helium MFC set to  0.000000
11/20/2011	3:39:24 PM	H2 MFC set to  0.000000
11/20/2011	3:39:24 PM	BCl3 MFC set to  0.000000
11/20/2011	3:39:24 PM	PHl3 MFC set to  0.000000
11/20/2011	3:39:24 PM	SiCl4 MFC set to  0.000000
11/20/2011	3:39:24 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	3:39:24 PM	Tube furnace set to 0
11/20/2011	3:44:24 PM	Helium valve closed
11/20/2011	3:44:24 PM	H2 valve closed
11/20/2011	3:44:24 PM	BCl3 valve closed
11/20/2011	3:44:24 PM	PH3 valve closed
11/20/2011	3:44:24 PM	SiCl4 pre valve closed
11/20/2011	3:44:24 PM	SiCl4 post valve closed
11/20/2011	3:44:24 PM	Bypass valve closed
11/20/2011	3:44:24 PM	Bubbler valve closed
11/20/2011	3:44:24 PM	Main Vac valve opened
11/20/2011	3:44:24 PM	Helium MFC set to  0.000000
11/20/2011	3:44:24 PM	H2 MFC set to  0.000000
11/20/2011	3:44:24 PM	BCl3 MFC set to  0.000000
11/20/2011	3:44:24 PM	PHl3 MFC set to  0.000000
11/20/2011	3:44:24 PM	SiCl4 MFC set to  0.000000
11/20/2011	3:44:24 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	3:44:24 PM	Tube furnace set to 0
11/20/2011	3:44:25 PM	Run finished at 3:44 PM
11/20/2011	4:15:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2011	4:15:32 PM	Recipe started at 4:15 PM
11/20/2011	4:15:32 PM	Helium valve closed
11/20/2011	4:15:32 PM	H2 valve closed
11/20/2011	4:15:32 PM	BCl3 valve closed
11/20/2011	4:15:32 PM	PH3 valve closed
11/20/2011	4:15:32 PM	SiCl4 pre valve closed
11/20/2011	4:15:32 PM	SiCl4 post valve closed
11/20/2011	4:15:32 PM	Main Vac valve closed
11/20/2011	4:15:32 PM	Bypass valve closed
11/20/2011	4:15:32 PM	Bubbler valve closed
11/20/2011	4:15:32 PM	Helium MFC set to  0.000000
11/20/2011	4:15:32 PM	H2 MFC set to  0.000000
11/20/2011	4:15:32 PM	BCl3 MFC set to  0.000000
11/20/2011	4:15:32 PM	PHl3 MFC set to  0.000000
11/20/2011	4:15:32 PM	SiCl4 MFC set to  0.000000
11/20/2011	4:15:32 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	4:15:32 PM	Tube furnace set to 0
11/20/2011	4:15:35 PM	H2 valve closed
11/20/2011	4:15:35 PM	BCl3 valve closed
11/20/2011	4:15:35 PM	PH3 valve closed
11/20/2011	4:15:35 PM	SiCl4 pre valve closed
11/20/2011	4:15:35 PM	SiCl4 post valve closed
11/20/2011	4:15:35 PM	Main Vac valve closed
11/20/2011	4:15:35 PM	Bypass valve closed
11/20/2011	4:15:35 PM	Bubbler valve closed
11/20/2011	4:15:35 PM	Helium valve opened
11/20/2011	4:15:35 PM	Helium MFC set to  500.000000
11/20/2011	4:15:35 PM	H2 MFC set to  0.000000
11/20/2011	4:15:35 PM	BCl3 MFC set to  0.000000
11/20/2011	4:15:35 PM	PHl3 MFC set to  0.000000
11/20/2011	4:15:35 PM	SiCl4 MFC set to  0.000000
11/20/2011	4:15:35 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	4:15:35 PM	Tube furnace set to 0
11/20/2011	4:16:37 PM	Helium valve closed
11/20/2011	4:16:37 PM	H2 valve closed
11/20/2011	4:16:37 PM	BCl3 valve closed
11/20/2011	4:16:37 PM	PH3 valve closed
11/20/2011	4:16:37 PM	SiCl4 pre valve closed
11/20/2011	4:16:37 PM	SiCl4 post valve closed
11/20/2011	4:16:37 PM	Main Vac valve closed
11/20/2011	4:16:37 PM	Bypass valve closed
11/20/2011	4:16:37 PM	Bubbler valve closed
11/20/2011	4:16:37 PM	Helium MFC set to  0.000000
11/20/2011	4:16:37 PM	H2 MFC set to  0.000000
11/20/2011	4:16:37 PM	BCl3 MFC set to  0.000000
11/20/2011	4:16:37 PM	PHl3 MFC set to  0.000000
11/20/2011	4:16:37 PM	SiCl4 MFC set to  0.000000
11/20/2011	4:16:37 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	4:16:38 PM	Tube furnace set to 0
11/20/2011	4:16:39 PM	Run finished at 4:16 PM
11/20/2011	4:16:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2011	4:18:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2011	4:18:45 PM	Recipe started at 4:18 PM
11/20/2011	4:18:45 PM	Helium valve closed
11/20/2011	4:18:45 PM	H2 valve closed
11/20/2011	4:18:45 PM	BCl3 valve closed
11/20/2011	4:18:45 PM	PH3 valve closed
11/20/2011	4:18:45 PM	SiCl4 pre valve closed
11/20/2011	4:18:45 PM	SiCl4 post valve closed
11/20/2011	4:18:45 PM	Main Vac valve closed
11/20/2011	4:18:45 PM	Bubbler valve closed
11/20/2011	4:18:45 PM	Bypass valve opened
11/20/2011	4:18:45 PM	Helium MFC set to  0.000000
11/20/2011	4:18:45 PM	H2 MFC set to  0.000000
11/20/2011	4:18:45 PM	BCl3 MFC set to  0.000000
11/20/2011	4:18:45 PM	PHl3 MFC set to  0.000000
11/20/2011	4:18:45 PM	SiCl4 MFC set to  0.000000
11/20/2011	4:18:45 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	4:18:45 PM	Tube furnace set to 0
11/20/2011	4:20:22 PM	Helium valve closed
11/20/2011	4:20:22 PM	H2 valve closed
11/20/2011	4:20:22 PM	BCl3 valve closed
11/20/2011	4:20:22 PM	PH3 valve closed
11/20/2011	4:20:22 PM	SiCl4 pre valve closed
11/20/2011	4:20:22 PM	SiCl4 post valve closed
11/20/2011	4:20:22 PM	Main Vac valve closed
11/20/2011	4:20:22 PM	Bubbler valve closed
11/20/2011	4:20:22 PM	Bypass valve opened
11/20/2011	4:20:22 PM	Helium MFC set to  0.000000
11/20/2011	4:20:22 PM	H2 MFC set to  0.000000
11/20/2011	4:20:22 PM	BCl3 MFC set to  0.000000
11/20/2011	4:20:22 PM	PHl3 MFC set to  0.000000
11/20/2011	4:20:22 PM	SiCl4 MFC set to  0.000000
11/20/2011	4:20:22 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	4:20:22 PM	Tube furnace set to 0
11/20/2011	4:21:22 PM	Helium valve closed
11/20/2011	4:21:22 PM	H2 valve closed
11/20/2011	4:21:22 PM	BCl3 valve closed
11/20/2011	4:21:22 PM	PH3 valve closed
11/20/2011	4:21:22 PM	SiCl4 pre valve closed
11/20/2011	4:21:22 PM	SiCl4 post valve closed
11/20/2011	4:21:22 PM	Bypass valve closed
11/20/2011	4:21:22 PM	Bubbler valve closed
11/20/2011	4:21:22 PM	Main Vac valve opened
11/20/2011	4:21:22 PM	Helium MFC set to  0.000000
11/20/2011	4:21:22 PM	H2 MFC set to  0.000000
11/20/2011	4:21:22 PM	BCl3 MFC set to  0.000000
11/20/2011	4:21:22 PM	PHl3 MFC set to  0.000000
11/20/2011	4:21:22 PM	SiCl4 MFC set to  0.000000
11/20/2011	4:21:22 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	4:21:22 PM	Tube furnace set to 0
11/20/2011	4:21:23 PM	Run finished at 4:21 PM
11/20/2011	4:21:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2011	6:50:01 PM	Main Vac valve closed
11/20/2011	6:50:36 PM	Main Vac valve opened
11/20/2011	6:50:55 PM	Recipe started at 6:50 PM
11/20/2011	6:50:55 PM	Helium valve closed
11/20/2011	6:50:55 PM	H2 valve closed
11/20/2011	6:50:55 PM	BCl3 valve closed
11/20/2011	6:50:55 PM	PH3 valve closed
11/20/2011	6:50:55 PM	SiCl4 pre valve closed
11/20/2011	6:50:55 PM	SiCl4 post valve closed
11/20/2011	6:50:55 PM	Main Vac valve closed
11/20/2011	6:50:55 PM	Bypass valve closed
11/20/2011	6:50:55 PM	Bubbler valve closed
11/20/2011	6:50:55 PM	Helium MFC set to  0.000000
11/20/2011	6:50:55 PM	H2 MFC set to  0.000000
11/20/2011	6:50:55 PM	BCl3 MFC set to  0.000000
11/20/2011	6:50:55 PM	PHl3 MFC set to  0.000000
11/20/2011	6:50:55 PM	SiCl4 MFC set to  0.000000
11/20/2011	6:50:55 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	6:50:55 PM	Tube furnace set to 0
11/20/2011	6:50:58 PM	Helium valve closed
11/20/2011	6:50:58 PM	BCl3 valve closed
11/20/2011	6:50:58 PM	PH3 valve closed
11/20/2011	6:50:58 PM	SiCl4 pre valve closed
11/20/2011	6:50:58 PM	SiCl4 post valve closed
11/20/2011	6:50:58 PM	Main Vac valve closed
11/20/2011	6:50:58 PM	Bypass valve closed
11/20/2011	6:50:58 PM	Bubbler valve closed
11/20/2011	6:50:58 PM	H2 valve opened
11/20/2011	6:50:58 PM	Helium MFC set to  0.000000
11/20/2011	6:50:58 PM	H2 MFC set to  500.000000
11/20/2011	6:50:58 PM	BCl3 MFC set to  0.000000
11/20/2011	6:50:58 PM	PHl3 MFC set to  0.000000
11/20/2011	6:50:58 PM	SiCl4 MFC set to  0.000000
11/20/2011	6:50:58 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	6:50:58 PM	Tube furnace set to 50
11/20/2011	6:52:04 PM	Helium valve closed
11/20/2011	6:52:04 PM	BCl3 valve closed
11/20/2011	6:52:04 PM	PH3 valve closed
11/20/2011	6:52:05 PM	SiCl4 pre valve closed
11/20/2011	6:52:05 PM	SiCl4 post valve closed
11/20/2011	6:52:05 PM	Main Vac valve closed
11/20/2011	6:52:05 PM	Bypass valve closed
11/20/2011	6:52:05 PM	H2 valve opened
11/20/2011	6:52:05 PM	Bubbler valve opened
11/20/2011	6:52:05 PM	Helium MFC set to  0.000000
11/20/2011	6:52:05 PM	H2 MFC set to  500.000000
11/20/2011	6:52:05 PM	BCl3 MFC set to  0.000000
11/20/2011	6:52:05 PM	PHl3 MFC set to  0.000000
11/20/2011	6:52:05 PM	SiCl4 MFC set to  0.000000
11/20/2011	6:52:05 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	6:52:05 PM	Tube furnace set to 50
11/20/2011	6:52:06 PM	Helium valve closed
11/20/2011	6:52:06 PM	BCl3 valve closed
11/20/2011	6:52:06 PM	PH3 valve closed
11/20/2011	6:52:06 PM	SiCl4 pre valve closed
11/20/2011	6:52:06 PM	SiCl4 post valve closed
11/20/2011	6:52:06 PM	Main Vac valve closed
11/20/2011	6:52:06 PM	Bypass valve closed
11/20/2011	6:52:06 PM	H2 valve opened
11/20/2011	6:52:06 PM	Bubbler valve opened
11/20/2011	6:52:06 PM	Helium MFC set to  0.000000
11/20/2011	6:52:06 PM	H2 MFC set to  450.000000
11/20/2011	6:52:06 PM	BCl3 MFC set to  0.000000
11/20/2011	6:52:06 PM	PHl3 MFC set to  0.000000
11/20/2011	6:52:06 PM	SiCl4 MFC set to  0.000000
11/20/2011	6:52:06 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	6:52:06 PM	Tube furnace set to 1000
11/20/2011	7:15:06 PM	Helium valve closed
11/20/2011	7:15:06 PM	PH3 valve closed
11/20/2011	7:15:06 PM	Main Vac valve closed
11/20/2011	7:15:06 PM	Bypass valve closed
11/20/2011	7:15:06 PM	H2 valve opened
11/20/2011	7:15:06 PM	BCl3 valve opened
11/20/2011	7:15:06 PM	SiCl4 pre valve opened
11/20/2011	7:15:06 PM	SiCl4 post valve opened
11/20/2011	7:15:06 PM	Bubbler valve opened
11/20/2011	7:15:06 PM	Helium MFC set to  0.000000
11/20/2011	7:15:06 PM	H2 MFC set to  495.000000
11/20/2011	7:15:06 PM	BCl3 MFC set to  0.700000
11/20/2011	7:15:06 PM	PHl3 MFC set to  0.000000
11/20/2011	7:15:06 PM	SiCl4 MFC set to  25.000000
11/20/2011	7:15:06 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	7:15:06 PM	Tube furnace set to 1000
11/20/2011	7:37:06 PM	Helium valve closed
11/20/2011	7:37:06 PM	BCl3 valve closed
11/20/2011	7:37:06 PM	PH3 valve closed
11/20/2011	7:37:06 PM	SiCl4 pre valve closed
11/20/2011	7:37:06 PM	SiCl4 post valve closed
11/20/2011	7:37:06 PM	Main Vac valve closed
11/20/2011	7:37:06 PM	Bypass valve closed
11/20/2011	7:37:06 PM	H2 valve opened
11/20/2011	7:37:06 PM	Bubbler valve opened
11/20/2011	7:37:06 PM	Helium MFC set to  0.000000
11/20/2011	7:37:06 PM	H2 MFC set to  500.000000
11/20/2011	7:37:06 PM	BCl3 MFC set to  0.000000
11/20/2011	7:37:06 PM	PHl3 MFC set to  0.000000
11/20/2011	7:37:06 PM	SiCl4 MFC set to  0.000000
11/20/2011	7:37:06 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	7:37:06 PM	Tube furnace set to 750
11/20/2011	7:47:06 PM	H2 valve closed
11/20/2011	7:47:06 PM	BCl3 valve closed
11/20/2011	7:47:06 PM	PH3 valve closed
11/20/2011	7:47:06 PM	SiCl4 pre valve closed
11/20/2011	7:47:06 PM	SiCl4 post valve closed
11/20/2011	7:47:06 PM	Main Vac valve closed
11/20/2011	7:47:06 PM	Bypass valve closed
11/20/2011	7:47:06 PM	Helium valve opened
11/20/2011	7:47:06 PM	Bubbler valve opened
11/20/2011	7:47:06 PM	Helium MFC set to  400.000000
11/20/2011	7:47:06 PM	H2 MFC set to  0.000000
11/20/2011	7:47:06 PM	BCl3 MFC set to  0.000000
11/20/2011	7:47:06 PM	PHl3 MFC set to  0.000000
11/20/2011	7:47:06 PM	SiCl4 MFC set to  0.000000
11/20/2011	7:47:06 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	7:47:06 PM	Tube furnace set to 0
11/20/2011	8:12:06 PM	Helium valve closed
11/20/2011	8:12:06 PM	H2 valve closed
11/20/2011	8:12:06 PM	BCl3 valve closed
11/20/2011	8:12:06 PM	PH3 valve closed
11/20/2011	8:12:06 PM	SiCl4 pre valve closed
11/20/2011	8:12:06 PM	SiCl4 post valve closed
11/20/2011	8:12:06 PM	Main Vac valve closed
11/20/2011	8:12:06 PM	Bypass valve closed
11/20/2011	8:12:06 PM	Bubbler valve closed
11/20/2011	8:12:06 PM	Helium MFC set to  0.000000
11/20/2011	8:12:06 PM	H2 MFC set to  0.000000
11/20/2011	8:12:06 PM	BCl3 MFC set to  0.000000
11/20/2011	8:12:06 PM	PHl3 MFC set to  0.000000
11/20/2011	8:12:06 PM	SiCl4 MFC set to  0.000000
11/20/2011	8:12:06 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	8:12:07 PM	Tube furnace set to 50
11/20/2011	8:17:07 PM	Helium valve closed
11/20/2011	8:17:07 PM	H2 valve closed
11/20/2011	8:17:07 PM	BCl3 valve closed
11/20/2011	8:17:07 PM	PH3 valve closed
11/20/2011	8:17:07 PM	SiCl4 pre valve closed
11/20/2011	8:17:07 PM	SiCl4 post valve closed
11/20/2011	8:17:07 PM	Main Vac valve closed
11/20/2011	8:17:07 PM	Bubbler valve closed
11/20/2011	8:17:07 PM	Bypass valve opened
11/20/2011	8:17:07 PM	Helium MFC set to  0.000000
11/20/2011	8:17:07 PM	H2 MFC set to  0.000000
11/20/2011	8:17:07 PM	BCl3 MFC set to  0.000000
11/20/2011	8:17:07 PM	PHl3 MFC set to  0.000000
11/20/2011	8:17:07 PM	SiCl4 MFC set to  0.000000
11/20/2011	8:17:07 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	8:17:07 PM	Tube furnace set to 0
11/20/2011	8:22:07 PM	Helium valve closed
11/20/2011	8:22:07 PM	H2 valve closed
11/20/2011	8:22:07 PM	BCl3 valve closed
11/20/2011	8:22:07 PM	PH3 valve closed
11/20/2011	8:22:07 PM	SiCl4 pre valve closed
11/20/2011	8:22:07 PM	SiCl4 post valve closed
11/20/2011	8:22:07 PM	Bypass valve closed
11/20/2011	8:22:07 PM	Bubbler valve closed
11/20/2011	8:22:07 PM	Main Vac valve opened
11/20/2011	8:22:07 PM	Helium MFC set to  0.000000
11/20/2011	8:22:07 PM	H2 MFC set to  0.000000
11/20/2011	8:22:07 PM	BCl3 MFC set to  0.000000
11/20/2011	8:22:07 PM	PHl3 MFC set to  0.000000
11/20/2011	8:22:07 PM	SiCl4 MFC set to  0.000000
11/20/2011	8:22:07 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	8:22:07 PM	Tube furnace set to 0
11/20/2011	8:22:08 PM	Run finished at 8:22 PM
11/20/2011	8:58:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2011	8:58:52 PM	Recipe started at 8:58 PM
11/20/2011	8:58:52 PM	Helium valve closed
11/20/2011	8:58:52 PM	H2 valve closed
11/20/2011	8:58:52 PM	BCl3 valve closed
11/20/2011	8:58:52 PM	PH3 valve closed
11/20/2011	8:58:52 PM	SiCl4 pre valve closed
11/20/2011	8:58:52 PM	SiCl4 post valve closed
11/20/2011	8:58:52 PM	Main Vac valve closed
11/20/2011	8:58:52 PM	Bypass valve closed
11/20/2011	8:58:52 PM	Bubbler valve closed
11/20/2011	8:58:52 PM	Helium MFC set to  0.000000
11/20/2011	8:58:52 PM	H2 MFC set to  0.000000
11/20/2011	8:58:52 PM	BCl3 MFC set to  0.000000
11/20/2011	8:58:52 PM	PHl3 MFC set to  0.000000
11/20/2011	8:58:52 PM	SiCl4 MFC set to  0.000000
11/20/2011	8:58:52 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	8:58:52 PM	Tube furnace set to 0
11/20/2011	8:58:55 PM	H2 valve closed
11/20/2011	8:58:55 PM	BCl3 valve closed
11/20/2011	8:58:55 PM	PH3 valve closed
11/20/2011	8:58:55 PM	SiCl4 pre valve closed
11/20/2011	8:58:55 PM	SiCl4 post valve closed
11/20/2011	8:58:55 PM	Main Vac valve closed
11/20/2011	8:58:55 PM	Bypass valve closed
11/20/2011	8:58:55 PM	Bubbler valve closed
11/20/2011	8:58:55 PM	Helium valve opened
11/20/2011	8:58:55 PM	Helium MFC set to  500.000000
11/20/2011	8:58:55 PM	H2 MFC set to  0.000000
11/20/2011	8:58:55 PM	BCl3 MFC set to  0.000000
11/20/2011	8:58:55 PM	PHl3 MFC set to  0.000000
11/20/2011	8:58:55 PM	SiCl4 MFC set to  0.000000
11/20/2011	8:58:55 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	8:58:55 PM	Tube furnace set to 0
11/20/2011	8:59:59 PM	Helium valve closed
11/20/2011	8:59:59 PM	H2 valve closed
11/20/2011	8:59:59 PM	BCl3 valve closed
11/20/2011	8:59:59 PM	PH3 valve closed
11/20/2011	8:59:59 PM	SiCl4 pre valve closed
11/20/2011	8:59:59 PM	SiCl4 post valve closed
11/20/2011	8:59:59 PM	Main Vac valve closed
11/20/2011	8:59:59 PM	Bypass valve closed
11/20/2011	8:59:59 PM	Bubbler valve closed
11/20/2011	8:59:59 PM	Helium MFC set to  0.000000
11/20/2011	8:59:59 PM	H2 MFC set to  0.000000
11/20/2011	8:59:59 PM	BCl3 MFC set to  0.000000
11/20/2011	8:59:59 PM	PHl3 MFC set to  0.000000
11/20/2011	8:59:59 PM	SiCl4 MFC set to  0.000000
11/20/2011	8:59:59 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	8:59:59 PM	Tube furnace set to 0
11/20/2011	9:00:00 PM	Run finished at 9:00 PM
11/20/2011	9:00:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/20/2011	9:10:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/20/2011	9:10:26 PM	Recipe started at 9:10 PM
11/20/2011	9:10:26 PM	Helium valve closed
11/20/2011	9:10:26 PM	H2 valve closed
11/20/2011	9:10:26 PM	BCl3 valve closed
11/20/2011	9:10:26 PM	PH3 valve closed
11/20/2011	9:10:26 PM	SiCl4 pre valve closed
11/20/2011	9:10:26 PM	SiCl4 post valve closed
11/20/2011	9:10:26 PM	Main Vac valve closed
11/20/2011	9:10:26 PM	Bubbler valve closed
11/20/2011	9:10:26 PM	Bypass valve opened
11/20/2011	9:10:26 PM	Helium MFC set to  0.000000
11/20/2011	9:10:26 PM	H2 MFC set to  0.000000
11/20/2011	9:10:26 PM	BCl3 MFC set to  0.000000
11/20/2011	9:10:26 PM	PHl3 MFC set to  0.000000
11/20/2011	9:10:26 PM	SiCl4 MFC set to  0.000000
11/20/2011	9:10:26 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	9:10:27 PM	Tube furnace set to 0
11/20/2011	9:12:16 PM	Helium valve closed
11/20/2011	9:12:16 PM	H2 valve closed
11/20/2011	9:12:16 PM	BCl3 valve closed
11/20/2011	9:12:16 PM	PH3 valve closed
11/20/2011	9:12:16 PM	SiCl4 pre valve closed
11/20/2011	9:12:16 PM	SiCl4 post valve closed
11/20/2011	9:12:16 PM	Main Vac valve closed
11/20/2011	9:12:16 PM	Bubbler valve closed
11/20/2011	9:12:16 PM	Bypass valve opened
11/20/2011	9:12:16 PM	Helium MFC set to  0.000000
11/20/2011	9:12:16 PM	H2 MFC set to  0.000000
11/20/2011	9:12:16 PM	BCl3 MFC set to  0.000000
11/20/2011	9:12:16 PM	PHl3 MFC set to  0.000000
11/20/2011	9:12:16 PM	SiCl4 MFC set to  0.000000
11/20/2011	9:12:16 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	9:12:16 PM	Tube furnace set to 0
11/20/2011	9:13:16 PM	Helium valve closed
11/20/2011	9:13:16 PM	H2 valve closed
11/20/2011	9:13:16 PM	BCl3 valve closed
11/20/2011	9:13:16 PM	PH3 valve closed
11/20/2011	9:13:16 PM	SiCl4 pre valve closed
11/20/2011	9:13:16 PM	SiCl4 post valve closed
11/20/2011	9:13:16 PM	Bypass valve closed
11/20/2011	9:13:16 PM	Bubbler valve closed
11/20/2011	9:13:16 PM	Main Vac valve opened
11/20/2011	9:13:16 PM	Helium MFC set to  0.000000
11/20/2011	9:13:16 PM	H2 MFC set to  0.000000
11/20/2011	9:13:16 PM	BCl3 MFC set to  0.000000
11/20/2011	9:13:16 PM	PHl3 MFC set to  0.000000
11/20/2011	9:13:16 PM	SiCl4 MFC set to  0.000000
11/20/2011	9:13:16 PM	Bypass solenoid MFC set to  0.000000
11/20/2011	9:13:16 PM	Tube furnace set to 0
11/20/2011	9:13:17 PM	Run finished at 9:13 PM
11/20/2011	9:13:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
